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1

[IEEE 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Santa Fe, NM, USA (2017.8.13-2017.8.17)] 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - A new extremely small sensor for measuring a blood flow and a contact pressure simultaneously

Inoue, Ryo, Nogami, Hirofumi, Higurashi, Eiji, Sawada, Renshi

Year:

2017

File:

PDF, 499 KB

2017

2

Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror

Itaru Ishikawa, Renshi Sawada, Eiji Higurashi, Shingo Sanada, Daisuke Chino

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.14 MB

english, 2007

3

Fabrication of micro IC probe for LSI testing

Ito Takahiro, Renshi Sawada, Eiji Higurashi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 774 KB

english, 2000

4

Prism interferometer for a compact Fourier-transform spectroscope

Kiyokura, Takanori, Ito, Takahiro, Sawada, Renshi

Journal:

Year:

2000

Language:

english

File:

PDF, 169 KB

english, 2000

5

Annularly Grooved Diaphragm Pressure Sensor With Embedded Silicon Nanowires for Low Pressure Application

Zhang, Songsong, Wang, Tao, Lou, Liang, Tsang, Wei Mong, Sawada, Renshi, Kwong, Dim-Lee, Lee, Chengkuo

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 2.66 MB

english, 2014

6

[IEEE 2012 IEEE CPMT Symposium Japan (Formerly VLSI Packaging Workshop of Japan) - Kyoto, Japan (2012.12.10-2012.12.12)] 2012 2nd IEEE CPMT Symposium Japan - Low-temperature bonding of laser diode chips using atmospheric-pressure plasma activation of flat topped Au stud bumps with smooth surfaces

Yamamoto, Michitaka, Sato, Takeshi, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Year:

2012

Language:

english

File:

PDF, 234 KB

english, 2012

7

Maskless Lithographic Fine Patterning on Deeply Etched or Slanted Surfaces, and Grayscale Lithography, Using Newly Developed Digital Mirror Device Lithography Equipment

Iwasaki, Wataru, Takeshita, Toshihiro, Peng, Yao, Ogino, Hiroaki, Shibata, Hiromasa, Kudo, Yuji, Maeda, Ryutaro, Sawada, Renshi

Journal:

Japanese Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 757 KB

english, 2012

8

Micro-encoder based on higher-order diffracted light interference

Higurashi, Eiji, Sawada, Renshi

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 574 KB

english, 2005

9

[IEEE 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2017.5.16-2017.5.18)] 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Fabrication and evaluation of molding and bonding tools for Au micromirror formation

Nishimura, Ryutaro, Matsuoka, Seiya, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Year:

2017

Language:

english

File:

PDF, 531 KB

english, 2017

10

[ASME ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference - San Francisco, California, USA (July 17–22, 2005)] Advances in Electronic Packaging, Parts A, B, and C - Surface Activated Flip-Chip Bonding of Laser Chips

Higurashi, Eiji, Nakagawa, Masao, Suga, Tadatomo, Sawada, Renshi

Year:

2005

Language:

english

File:

PDF, 491 KB

english, 2005

11

Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application

Yang, Zhuoqing, Shi, Jianhao, Sun, Bin, Yao, Jinyuan, Ding, Guifu, Sawada, Renshi

Journal:

Year:

2018

Language:

english

File:

PDF, 3.70 MB

english, 2018

12

A Single-Fiber Endoscope Scanner Probe Utilizing Two-Degrees-of-Freedom (2DOF) High-Order Resonance to Realize Larger Scanning Angle

Yao, Jinyuan, Yang, Zhuoqing, Peng, Tao, Sun, Bin, Zhang, Haodong, Zhao, Mengyuan, Dai, Bo, Liu, Hua, Ding, Guifu, Sawada, Renshi

Journal:

IEEE Transactions on Components Packaging and Manufacturing Technology

Year:

2019

Language:

english

File:

PDF, 1.54 MB

english, 2019

13

Laser-based Microsensors

Renshi Sawada, Eiji Higurashi

Journal:

Year:

1999

Language:

english

File:

PDF, 3.06 MB

english, 1999

14

Miniaturization of a Laser Doppler Blood Flow Sensor by System-in-Package Technology: Fusion of an Optical Microelectromechanical Systems Chip and Integrated Circuits

Wataru Iwasaki, Hirofumi Nogami, Eiji Higurashi, Renshi Sawada

Journal:

IEEJ Transactions on Electrical and Electronic Engineering

Year:

2010

Language:

english

File:

PDF, 491 KB

english, 2010

15

Integrated coupling device between a laser diode and an optical fiber using a microlens

Jun-Ichi Shimada, Osamu Ohguchi, Renshi Sawada, Hidenao Tanaka, Akinori Watabe

Journal:

Electronics and Communications in Japan (Part II: Electronics))

Year:

1994

Language:

english

File:

PDF, 628 KB

english, 1994

16

Gradient-index microlens formed by ion-beam sputtering

Shimada, Jun-ichi, Ohguchi, Osamu, Sawada, Renshi

Journal:

Year:

1992

Language:

english

File:

PDF, 1.04 MB

english, 1992

17

Monolithically Integrated Optical Displacement Sensor Based on Triangulation and Optical Beam Deflection

Higurashi, Eiji, Sawada, Renshi, Ito, Takahiro

Journal:

Year:

1999

Language:

english

File:

PDF, 292 KB

english, 1999

18

Monolithic-Integrated Microlaser Encoder

Sawada, Renshi, Higurashi, Eiji, Ito, Takahiro, Ohguchi, Osamu, Tsubamoto, Mieko

Journal:

Year:

1999

Language:

english

File:

PDF, 3.49 MB

english, 1999

19

Small Fourier Transform Spectroscope Using an Integrated Prism-Scanning Interferometer

Kiyokura, Takanori, Ito, Takahiro, Sawada, Renshi

Journal:

Applied Spectroscopy

Year:

2001

Language:

english

File:

PDF, 381 KB

english, 2001

20

Fourier Transform Near-Infrared Spectrometer Using a Corner-Cube Integrated Prism Scanning Interferometer

Kiyokura, Takanori, Ito, Takahiro, Sawada, Renshi

Journal:

Applied Spectroscopy

Year:

2004

Language:

english

File:

PDF, 154 KB

english, 2004

21

Low-temperature hermetic packaging for microsystems using Au–Au surface-activated bonding at atmospheric pressure

Yamamoto, Shin-ichi, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 845 KB

english, 2012

22

[IEEE High Density Packaging (ICEPT-HDP) - Beijing, China (2009.08.10-2009.08.13)] 2009 International Conference on Electronic Packaging Technology & High Density Packaging - Low-temperature bonding of laser diode chips on Si substrates with oxygen and hydrogen atmospheric-pressure plasma activation

Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Year:

2009

Language:

english

File:

PDF, 830 KB

english, 2009

23

[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - Low-power consumption integrated laser Doppler blood flowmeter with a built-in silicon microlens

Yoshinori Kimura,, Atsushi Onoe,, Eiji Higurashi,, Renshi Sawada,

Year:

2008

Language:

english

File:

PDF, 610 KB

english, 2008

24

Continuous-wave operation and mirror loss of a U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrors

Shimokawa, Fusao, Tanaka, Hidenao, Sawada, Renshi, Hara, Shigeji

Journal:

Applied Physics Letters

Year:

1990

Language:

english

File:

PDF, 604 KB

english, 1990

25

[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - Three-dimensional integration of optical multi-chips using surface-activated bonding for high-density microsystems packaging

Higurashi, Eiji, Chino, Daisuke, Suga, Tadatomo, Sawada, Renshi

Year:

2008

Language:

english

File:

PDF, 670 KB

english, 2008

26

[IEEE 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP) - Singapore (2014.4.21-2014.4.24)] 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP) - Two axial shearing force measurement device with a built-in integrated micro displacement sensor

Takeshita, Toshihiro, Iwasaki, Takuma, Harisaki, Kota, Sawada, Renshi, Ando, Hideyuki, Arinaga, Yuji, Higurashi, Eiji

Year:

2014

Language:

english

File:

PDF, 476 KB

english, 2014

27

[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Application of nano-imprint technology to grating scale for a rotary microencoder

Takeshita, Toshihiro, Iwasaki, Takuma, Higurashi, Eiji, Miyazaki, Tatsuya, Sawada, Renshi

Year:

2013

Language:

english

File:

PDF, 1.89 MB

english, 2013

28

[IEEE 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering (NANOMED) - Tainan, Taiwan (2009.10.18-2009.10.21)] 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering - Micro integrated laser Doppler blood flow sensor and its application to dehydration prevention

Nogami, Hirofumi, Iwasaki, Wataru, Matsuoka, Fumio, Akase, Kazuyoshi, Kimura, Yoshinori, Onoe, Atushi, Higurashi, Eiji, Takeuchi, Satoshi, Kido, Makiko, Furue, Masutaka, Sawada, Renshi

Year:

2009

Language:

english

File:

PDF, 1.70 MB

english, 2009

29

[IEEE 2010 First International Conference on Sensor Device Technologies and Applications (SENSORDEVICES) - Venice, Italy (2010.07.18-2010.07.25)] 2010 First International Conference on Sensor Device Technologies and Applications - Influence of Alcohol Consumption on Blood Flow as Detected Using a Micro Integrated Laser Doppler Blood Flowmeter

Iwasaki, Wataru, Ito, Hiroki, Nogami, Hirofumi, Sawada, Renshi, Kimura, Yoshinori, Onoe, Atsushi, Takeuchi, Satoshi, Furue, Masutaka, Higurashi, Eiji

Year:

2010

Language:

english

File:

PDF, 1.04 MB

english, 2010

30

Nanometer-displacement detection of optically trapped metallic particles based on critical angle method for small force detection

Higurashi, Eiji, Sawada, Renshi, Ito, Takahiro

Journal:

Review of Scientific Instruments

Year:

1999

Language:

english

File:

PDF, 445 KB

english, 1999

31

Shearing force measurement device with a built-in integrated micro displacement sensor

Iwasaki, Takuma, Takeshita, Toshihiro, Arinaga, Yuji, Uemura, Koji, Ando, Hideyuki, Takeuchi, Satoshi, Furue, Masutaka, Higurashi, Eiji, Sawada, Renshi

Journal:

Sensors and Actuators A: Physical

Year:

2015

Language:

english

File:

PDF, 2.34 MB

english, 2015

32

Reactive–fast-atom beam etching of GaAs using Cl2 gas

Shimokawa, Fusao, Tanaka, Hidenao, Uenishi, Yuji, Sawada, Renshi

Journal:

Journal of Applied Physics

Year:

1989

Language:

english

File:

PDF, 902 KB

english, 1989

33

[IEEE 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2012.05.22-2012.05.23)] 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration - Low-temperature bonding of optical chips using coined Au stud bumps and its application to micro laser Doppler velocimeter

Yamamoto, Michitaka, Sato, Takeshi, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Year:

2012

Language:

english

File:

PDF, 642 KB

english, 2012

34

Durability of Mechanical Damage Gettering Effect in Si Wafers

Journal:

Japanese Journal of Applied Physics

Year:

1984

File:

PDF, 1.50 MB

1984

35

Mechanical Damage Gettering Effect in Si

Sawada, Renshi, Karaki, Toshiroh, Watanabe, Junji

Journal:

Japanese Journal of Applied Physics

Year:

1981

File:

PDF, 1.31 MB

1981

36

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Integrated micro laser Doppler velocimeter with 3-D structure

Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Year:

2010

Language:

english

File:

PDF, 657 KB

english, 2010

37

[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Low-temperature gold-gold bonding using argon and hydrogen gas mixture atmospheric-pressure plasma treatment for optical microsystems

Higurashi, Eiji, Yamamoto, Michitaka, Ikeda, So, Suga, Tadatomo, Sawada, Renshi

Year:

2014

Language:

english

File:

PDF, 168 KB

english, 2014

38

[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Scanning angle control of the optical micro scanner actuated by electrostatic force

Ishikawa, Noriaki, Ikeda, Kentaro, Okazaki, Koji, Sawada, Renshi

Year:

2014

File:

PDF, 503 KB

2014

39

[IEEE 2014 IEEE CPMT Symposium Japan (ICSJ) - Kyoto, Japan (2014.11.4-2014.11.6)] IEEE CPMT Symposium Japan 2014 - Optical micro sensors integration and application

Morita, Nobutomo, Sawada, Renshi

Year:

2014

Language:

english

File:

PDF, 1.19 MB

english, 2014

40

Room-Temperature Bonding of Vertical-Cavity Surface-Emitting Laser Chips on Si Substrates Using Au Microbumps in Ambient Air

Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Sawada, Renshi

Journal:

Applied Physics Express

Year:

2008

Language:

english

File:

PDF, 767 KB

english, 2008

41

[IEEE 2014 International Conference on Optical MEMS and Nanophotonics (OMN) - Glasgow, UK (2014.8.17-2014.8.21)] 2014 International Conference on Optical MEMS and Nanophotonics - Two axial shearing force measurement device with a micro displacement sensor

Harisaki, Kota, Takeshita, Toshihiro, Iwasaki, Takuma, Ando, Hideyuki, Uemura, Koji, Higurashi, Eiji, Sawada, Renshi

Year:

2014

Language:

english

File:

PDF, 201 KB

english, 2014

42

Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Furuya, Akinori, Shimokawa, Fusao, Matsuura, Tohru, Sawada, Renshi

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 1016 KB

english, 1996

43

Axial and Lateral Displacement Measurements of a Microsphere Based on the Critical-Angle Method

Higurashi, Eiji, Sawada, Renshi, Ito, Takahiro

Journal:

Japanese Journal of Applied Physics

Year:

1998

File:

PDF, 1.36 MB

1998

44

[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Design and fabrication of driving microcoil with large tilt-angle for medical scanner application

Sun, Bin, Sawada, Renshi, Yang, Zhuoqing, Zhang, Yi, Itoh, Toshihiro, Maeda, Ryutaro

Year:

2014

Language:

english

File:

PDF, 854 KB

english, 2014

45

Integrated micro-displacement sensor that uses beam divergence

Ito, Takahiro, Sawada, Renshi, Higurashi, Eiji

Journal:

Journal of Micromechanics and Microengineering

Year:

2003

Language:

english

File:

PDF, 191 KB

english, 2003

46

A Piezoelectric Micromachined Ultrasonic Transducer Using Piston-Like Membrane Motion

Wang, Tao, Sawada, Renshi, Lee, Chengkuo

Journal:

IEEE Electron Device Letters

Year:

2015

Language:

english

File:

PDF, 719 KB

english, 2015

47

[IEEE 2015 International Conference on Optical MEMS and Nanophotonics (OMN) - Jerusalem (2015.8.2-2015.8.5)] 2015 International Conference on Optical MEMS and Nanophotonics (OMN) - Contact pressure measurement device with a laser micro-displacement sensor

Hayashida, Yuma, Harisaki, Kota, Takeshita, Toshihiro, Morita, Nobutomo, Ando, Hideyuki, Higurashi, Eiji, Nogami, Hirohumi, Sawada, Renshi

Year:

2015

Language:

english

File:

PDF, 1.30 MB

english, 2015

48

Temperature dependence of the scanning performance of an electrostatic microscanner

Ishikawa, Noriaki, Ikeda, Kentaro, Sawada, Renshi

Journal:

Journal of Micromechanics and Microengineering

Year:

2016

Language:

english

File:

PDF, 1.10 MB

english, 2016

49

Development of a Built-In Micro-Laser Doppler Velocimeter

Morita, Nobutomo, Nogami, Hirofumi, Higurashi, Eiji, Ito, Takahiro, Sawada, Renshi

Journal:

Journal of Microelectromechanical Systems

Year:

2016

Language:

english

File:

PDF, 2.78 MB

english, 2016

50

Development and evaluation of a two-axial shearing force sensor consisting of an optical sensor chip and elastic gum frame

Takeshita, Toshihiro, Harisaki, Kota, Ando, Hideyuki, Higurashi, Eiji, Nogami, Hirofumi, Sawada, Renshi

Journal:

Precision Engineering

Year:

2016

Language:

english

File:

PDF, 1.94 MB

english, 2016